Browsing by Subject "Magnetron sputtering"
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Structural and optoelectronic properties of sputtered copper(I) chloride
(2005)Copper (I) Chloride is a wide band gap semiconductor with great potential for silicon-based optoelectronics due to the fact that is closely lattice matched with silicon. This work examines the deposition of CuCl thin films ... -
Suppression of the metal-insulator transition in magnetron sputtered Ti2O3 films
(2020)We report on the synthesis of titanium suboxide films using a magnetron sputtering setup. The structure of the produced films is characterized using Raman spectroscopy and X-ray diffraction and electrical properties are ...