dc.contributor.author | CROSS, GRAHAM | |
dc.contributor.author | O'CONNELL, BARRY SEAMUS | |
dc.contributor.author | PETHICA, JOHN BERNARD | |
dc.date.accessioned | 2009-03-10T16:08:02Z | |
dc.date.available | 2009-03-10T16:08:02Z | |
dc.date.created | 12-14 Aug. 2003 | en |
dc.date.issued | 2003 | |
dc.date.submitted | 2003 | en |
dc.identifier.citation | O'Connell, B., Cross, G.L.W., Pethica, J.B. and Oliver, W. `Nanorheology of squeezed polymer films? in Proceedings of Third IEEE Conference on Nanotechnology, 12-14 Aug., 2003, 2, IEEE, pp 793-796 | en |
dc.identifier.other | Y | en |
dc.identifier.other | Y | |
dc.identifier.uri | http://hdl.handle.net/2262/28126 | |
dc.description | PUBLISHED | en |
dc.description.abstract | We present investigations of submicrometer quasi-two dimensional flow mechanics of squeezed thin polymer films in the context of nanoimprint lithography. The polymer films were indented by patterned spherical indenters above and below the glass transition region in a temperature controlled nanoindenter. Static and dynamical mechanical characteristics of the contact were monitored during the printing process. We demonstrate the relation of substrate deformation in the cold embossing technique and residual stress relaxation during hot embossing to the overall pattern transfer fidelity during isothermal stamping. | en |
dc.description.sponsorship | The authors would like to thank the Science Foundation of
Ireland for funding this research. | en |
dc.format.extent | 366 bytes | |
dc.format.extent | 793-796 | en |
dc.format.mimetype | application/pdf | |
dc.language.iso | en | en |
dc.publisher | IEEE | en |
dc.relation.ispartofseries | 2 | en |
dc.rights | Y | en |
dc.subject | cold embossing method | en |
dc.subject | dynamical mechanical characteristics | en |
dc.subject | glass transition | en |
dc.subject | hot embossing | en |
dc.subject | isothermal stamping | en |
dc.subject | nanoimprint lithography | en |
dc.subject | nanoindenter | en |
dc.subject | nanorheology | en |
dc.subject | pattern transfer fidelity | en |
dc.subject | patterned spherical indenters | en |
dc.subject | residual stress relaxation | en |
dc.subject | squeezed thin polymer films | en |
dc.subject | statical mechanical characteristics | en |
dc.subject | submicrometer | en |
dc.subject | quasi two dimensional flow mechanics | en |
dc.subject | substrate deformation | en |
dc.title | Nanorheology of squeezed polymer films | en |
dc.type | Conference Paper | en |
dc.type.supercollection | scholarly_publications | en |
dc.type.supercollection | refereed_publications | en |
dc.identifier.peoplefinderurl | http://people.tcd.ie/crossg | |
dc.identifier.rssinternalid | 3200 | |
dc.identifier.rssuri | http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=1231033&isnumber=27574 | |
dc.contributor.sponsor | Science Foundation Ireland | |