Predictions of the Compressible Fluid Model and its Comparison to Experimental Measurements of Q Factors and Flexural Resonance Frequencies for Microcantilevers
Citation:
Jensen, J. and Hegner, M., Predictions of the Compressible Fluid Model and its Comparison to Experimental Measurements of Q Factors and Flexural Resonance Frequencies for Microcantilevers, Journal of Sensors, 2012, 2012, 258381-Download Item:
Abstract:
The qualitative agreement between experimental measurements of the 𝑄 factors and flexural resonance frequencies in air of microcantilevers and calculations based on the compressible fluid model of Van Eysden and Sader (2009) is presented. The 𝑄 factors and resonance frequencies observed on two sets of cantilever arrays were slightly lower than those predicted by the model. This is attributed to the individual design and geometry of the microfabricated hinged end of the cantilever beams in the array.
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Grant Number
Science Foundation Ireland (SFI)
SFI08/CE/I1432
Science Foundation Ireland (SFI)
SFI/09IN/1B2623
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http://people.tcd.ie/hegnermDescription:
PUBLISHEDInverse behaviour of Quality factors observed in higher modes in the gas phase
Author: HEGNER, MARTIN
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Journal ArticleCollections
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Journal of Sensors2012
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𝑄 factorsSubject (TCD):
Nanoscience & MaterialsDOI:
http://dx.doi.org/10.1155/2012/258381Metadata
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