Nanomechanical forming studies of thin polymer films
Citation:
Barry O'Connell, 'Nanomechanical forming studies of thin polymer films', [thesis], Trinity College (Dublin, Ireland). School of Physics, 2008, pp 191Abstract:
Nanoimprint is a technique that involves mechanical patterning using a rigid
patterned stamp on a deformable thin film to produce nanostructures. It is
also a technique that is the focus of much research because of the benefits it
brings over other nanofabricarion methods. It is a planar process potentially
capable of producing high resolution features at a high throughput and low
cost since it's inception in 1995 reproducing features smaller than 25nm [1]
and soon afterwards, features below 10nm in 1997 [2].
Author: O'Connell, Barry
Advisor:
Pethica, J.B.Qualification name:
Doctor of Philosophy (Ph.D.)Publisher:
Trinity College (Dublin, Ireland). School of PhysicsNote:
TARA (Trinity's Access to Research Archive) has a robust takedown policy. Please contact us if you have any concerns: rssadmin@tcd.ieType of material:
thesisAvailability:
Full text availableKeywords:
Physics, Ph.D., Ph.D. Trinity College DublinMetadata
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